• Jarek Antoszewski, Principal Research Fellow
• Nima Dehdashti, Super Science Fellow
• John Dell, Emeritus Professor
• Lorenzo Faraone, Head of MRG
• Ken Fogden, Technical Manager
• Gurpreet Singh Gill, Research Associate
• Renjie Gu, Senior Engineer
• Martin Hill, Associate Professor
• Karen Kader, School Assistant (Microelectronics)
• Hemendra Kala, Research Fellow
• Adrian Keating, Professor
• Wen Lei, Professor
• Yinong Liu, Professor
• Mariusz Martyniuk, Principal Research Fellow
• Brett Nener, Professor
• Wenwu Pan, Research Fellow
• Gia Parish, Professor
• Dilusha Silva, Associate Professor
• Gilberto Umana-Membreno, Principal Research Fellow
• Michal Zawierta, Research Fellow

• Kevin Fynn, Adjunct Associate Professor
• Roger Jeffery, Adjunct Associate Professor
• Gino Putrino, Adjunct Associate Professor
• Nicola Sasanelli, Adjunct Associate Professor

• Oleg Bannik, PhD Student
• Jesse Fletcher, PhD Student
• Farhad Foroozandeh, PhD Student
• Jega Thisan Gurusamy, PhD Student
• Yan Liu, PhD Student
• Daniel Morley, PhD Student
• Pranjal Mukherji, Visiting Research Student
• Fahia Munna, PhD Student
• Aayushi Nanda, PhD Student
• Aayushi Nanda, Masters Student
• Damini Rangaswamy, PhD Student
• Kanwal Zakir, PhD Student
• Zekai Zhang, PhD Student

The Microelectronics Research Group is an active member of the Australian Nanotechnology Network (ANN). Nanotechnology has been identified by industry and governments globally as a priority area of research, and billions of dollars have been invested in research and development. The US has launched a National Nanotechnology Initiative, and other major economies have already addressed this important need through the creation of major European and Asian networks in nanotechnology.

Nanotechnology is decidedly interdisciplinary and straddles all science and engineering disciplines.

To adequately seize the enormous research opportunities that exist in this new field, and to maximise the outcomes of such research for the nation, it is essential that links are fostered to allow researchers to interact across discipline boundaries. Australia has distinct nanotechnology thrusts in areas of nanoparticles, nano materials/devices, semiconductor electronics/optoelectronics, functional nanomaterials and polymers/composites.

ANN intends to bring together all the groups working in the field of nanotechnology and related areas in Australia. The ANN aims to substantially enhance Australia's research outcomes in this important field by promoting effective collaboration and exposing researchers to alternative and complementary approaches from other fields.

The Network will promote international links, create forum for students, young investigators and entrepreneurs, enhance the awareness of existing infrastructure and actively seek to enhance the nanotechnology infrastructure in the country, and carry out outreach activities to enhance the public awareness of nanotechnology. In order to cover the broader areas and to create critical mass, four seed funding networks have joined to create ANN.

The Western Australian Centre for Semiconductor Optoelectronics and Microsystems (WACSOM) was established in 2003 and the Centre manager is Prof. Mariusz Martyniuk. The WACSOM facility is a fully-equipped semiconductor fabrication laboratory which includes: chemical vapour deposition systems and thermal and electron-beam evaporators for thin film deposition (dielectrics, metals, semiconductors); reactive ion etching systems for dry etching of materials; rapid thermal annealer; photolithography facilities including mask aligners; fume hoods for chemical processing; and surface profilers and optical microscopes (Nomarski) for in-line test and inspection. The nanofabrication facility is equipped with reticulated de-ionised water, compressed air, chilled water and process gases.

The State Government funding provided, via a Western Australian State Government Centres of Excellence Program funded from the Premiers Office of Science and Innovation, to the Centre was used for specific equipment purchase and the building/refurbishment of the A. G. Nassibian Nanofabrication Facility (NNF), which is located within the School of Electrical, Electronic and Computer Engineering at The University of Western Australia. The Facility was commissioned in September/October 2003 and officially opened on the 20th June 2004, by the Deputy Premier, the Honorable Eric Ripper.

Projects

A wide range of projects are currently being undertaken in the facility:

• Fabrication of infrared photodetectors, utilising on the semiconductor mercury cadmium telluride.
• Fabrication of GaN-based devices for development of ultraviolet detectors and high performance electronic devices.
• Fabrication of MEMS devices for integration with temperature sensitive compound semiconductors for use in optical applications.
• Fabrication of MEMS devices for electronic components.
• Micro-machining for fabrication of silicon-based heat-exchangers in novel refrigeration units.
• Development of various dry etching and thin film deposition techniques for application in projects at other research institutions.

Key Researchers:

• W/Prof. Lorenzo Faraone Professor, BEng PhD W.Aust.
  Professor, School of Engineering, Electrical, Electronic and Computer Engineering Institute of Agriculture
  

• W/Prof. John Dell Emeritus Professor, BE PhD W.Aust. , FIEAUST
  Emeritus Professor, School of Engineering, Electrical, Electronic and Computer Engineering

• Prof. Brett Nener Professor, MSc Tokyo, BE PhD W.Aust., SMIEEE
  Professor, School of Engineering, Electrical, Electronic and Computer Engineering

• Prof. Gia Parish Director, UWA Defence & Security Institute, Professor
  Professor, School of Engineering, Electrical, Electronic and Computer Engineering

• Prof. Jarek Antoszewski Associate Professor
  Principal Research Fellow, School of Engineering, Electrical, Electronic and Computer

• Prof. Mariusz Martyniuk Associate Professor, FAIP, SMIEEE, Dr
  Principal Research Fellow, School of Engineering, Electrical, Electronic and Computer

• Prof. Yinong Liu Professor
  Professor, School of Engineering, Mechanical Engineering

• Prof. Adrian Keating Professor
  Professor, School of Engineering, Mechanical Engineering

The Australian National Fabrication Facility provides access to micro and nanofabrication services to enable Australia's innovation agenda.

Find out more